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The term "Hazardous production materials" specifically refers to the substances that are actively involved in the processes of semiconductor manufacturing, which often include various chemicals used in the fabrication and doping processes. These materials are critical for forming and altering the properties of semiconductor devices, making them an integral part of the production phase.

Hazardous production materials encompass a wide range of chemicals that can pose risks to health and the environment, thus necessitating stringent safety measures and regulations during their use. Understanding that these materials are a vital component in manufacturing helps clarify safety protocols and environmental considerations that must be adhered to in semiconductor production.

In contrast, other terms such as hazardous waste materials refer to the by-products of manufacturing that must be disposed of safely, while chemical safety substances may encompass a broader category that includes both beneficial and hazardous materials rather than focusing solely on those specifically relevant to production processes. Source materials might imply raw inputs for manufacturing without the specific connotation of hazards associated during production, further distinguishing the nuanced terminology within semiconductor manufacturing contexts.